應(yīng)用Applications


◆各類4”、5”、6”、8”晶片表面SiO2膜的化學(xué)蝕刻 
Chemical etching for 4 “, 5”, 6 “, 8” wafer surface with SiO2 film◆石英、光學(xué)、太陽能等硅元件的化學(xué)蝕刻
Chemical etching for quartz, optical, solar energy silicon element
◆集成微納系統(tǒng)濕法蝕刻 MEMS wet etching